Challenges facing practical DFT for MEMS

IEEE International Workshop on Defect and Fault Tolerance in VLSI Systems

Volumn , Issue , 2001, Pages 11-17

  Tewksbury, S K ^a  

^a STEVENS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUILT-IN SELF TEST; ELECTRONIC EQUIPMENT TESTING; FAILURE ANALYSIS; INSPECTION; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTROMECHANICAL DEVICES; VLSI CIRCUITS; WSI CIRCUITS;

DEFECT AND FAULT TOLERANCE TECHNIQUES; MICROELECTROMECHANICAL SYSTEMS TECHNOLOGY; MICROSYSTEMS TECHNOLOGY;

FAULT TOLERANT COMPUTER SYSTEMS;

EID: 0035201601     PISSN: 10636722     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Special issue on integrated sensors, microactuators, and microsystems (MEMS)
2. MEMS: Micro technology, mega impact
3. Surface micromachined accelerometers
4. Wavelength add-drop switching using tilting micromirrors
5. MEMS reliability and testing
6. Packaging design of microsystems and meso-scale devices
7. Development of a MEMS microvalve array for fluid flow control