In-plane MEMS-based nano-g accelerometer with sub-wavelength optical resonant sensor

Sensors and Actuators, A: Physical

Volumn 145-146, Issue 1-2, 2008, Pages 283-290

  Krishnamoorthy, U ^a   Olsson III, R H ^a   Bogart, G R ^b   Baker, M S ^a   Carr, D W ^b   Swiler, T P ^a   Clews, P J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Symphony Acoustics Inc   (United States)

Author keywords

In plane accelerometer; Low g accelerations; MEMS optical accelerometer; Nano grating; Optical resonant detection; Optical sensing

Indexed keywords

ACCELERATION; ACCELEROMETERS; CHEMICAL SENSORS; DETECTORS; FLOORS; LITHOGRAPHY; MICROFLUIDICS; NATURAL FREQUENCIES; OPTICAL SENSORS;

1 / F NOISE; ACCELERATION SENSING; ACCELERATION SENSORS; CORRELATED DOUBLE SAMPLING (CDS); DETECTION LIMIT (DL); DISPLACEMENT SENSORS; HIGHLY SENSITIVE; IN-PLANE (IP); INTEGRATION PROCESSES; LOW FREQUENCY (LF); NOISE FLOORS; OPTICAL RESONANT; OPTICAL SENSING; RESONANT FREQUENCIES; SUB WAVELENGTH;

SENSORS;

EID: 44849090017     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.03.017     Document Type: Article

References (8)

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