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Volumn 518, Issue 23, 2010, Pages 6933-6937

Making modified fluoropolymer molds for ultraviolet nanoimprint lithography

Author keywords

Additive; Cast molding process; Fluoropolymer molds; Sub 30 nm structures

Indexed keywords

CAST-MOLDING PROCESS; COMMERCIAL POLYMERS; ELECTRONIC BEAM LITHOGRAPHY; FINE FEATURE; FLUOROPOLYMER; HIGH ASPECT RATIO; LOW SURFACE ENERGY; NANO-IMPRINT; RESIST PATTERN; SOLVENT RESISTANT; SUB-30 NM STRUCTURES; SURFACE ENERGIES; ULTRAVIOLET-NANOIMPRINT LITHOGRAPHY;

EID: 77956230928     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.06.038     Document Type: Article
Times cited : (8)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.