Review of production of microfluidic devices: Material, manufacturing and metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6993, Issue , 2008, Pages

  Li, Shiguang ^a,b,c   Xu, Zhiguang ^a,b,c   Mazzeo, Aaron ^e   Burns, Daniel J ^e   Fu, Gang ^a,d   Dirckx, Matthew ^e   Shilpiekandula, Vijay ^e   Chen, Xing ^a,d   Nayak, Nimai C ^a,d   Wong, Eehern ^e   Yoon, Soon Fatt ^a,b   Fang, Zhong Ping ^c   Youeef Toumi, Kamal ^e   Hardt, David ^e   Tor, Shu Beng ^a,d   Yue, Chee Yoon ^a,d   Chun, Jung Hoon ^e  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^d NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^e Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Bio MEMS; Lab on a chip; Material; Measurement; Microfluid; Tooling and processing

Indexed keywords

COMPOSITE MICROMECHANICS; CONTROL THEORY; ELECTROCHEMICAL SENSORS; FLUIDIC DEVICES; FLUIDICS; MACHINING; MATERIALS PROPERTIES; MEASUREMENTS; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFLUIDICS; MICROMACHINING; NANOFLUIDICS; PAPER; PARAMETER ESTIMATION; PIGMENTS; PRODUCTION CONTROL; QUALITY CONTROL;

(E ,3E) PROCESS; (P ,P ,T) MEASUREMENTS; (PL) PROPERTIES; BONDING QUALITY; DEFECT INSPECTION; DEVICE PERFORMANCES; DIMENSIONAL MEASUREMENTS; EXPERIMENTAL RESULTS; HOT EMBOSSING PROCESS; LIFE SCIENCES; MATE RIAL PROPERTIES; MICRO-FLUIDIC DEVICES; PROCESSING METHODS; PRODUCT QUALITIES; PRODUCTION PARAMETERS;

PROCESS CONTROL;

EID: 44949152605     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.781942     Document Type: Conference Paper

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