Surface acoustic wave properties of aluminum oxide films on lithium niobate

Thin Solid Films

Volumn 518, Issue 23, 2010, Pages 7143-7146

  Shih, Wen Ching ^a   Wang, Tzyy Long ^a   Hsu, Li Lun ^a  

^a TATUNG UNIVERSITY   (Taiwan)

Author keywords

Aluminum oxide film; Electron beam evaporation; Lithium niobate; Surface acoustic wave

Indexed keywords

ALUMINUM OXIDE FILMS; ALUMINUM OXIDES; CHANGE RATIO; DIAMOND-LIKE; ELECTRON BEAM EVAPORATION; LITHIUM NIOBATE; SAW DEVICE; STIFFENING EFFECT; SURFACE ACOUSTIC WAVE; SURFACE ACOUSTIC WAVES;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ALUMINUM; ARGON; ELECTRON BEAMS; ELECTRON OPTICS; EVAPORATION; LITHIUM; NIOBIUM COMPOUNDS; OPTICAL FILMS; OXIDES; VELOCITY;

OXIDE FILMS;

EID: 77956227258     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.07.029     Document Type: Article

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