Study and optimization of alumina and germanium dioxide and their multilayer capacitor properties

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 170, Issue 1, 2000, Pages 105-114

  Segda, B Gérard ^a   Jacquet, M ^b   Caapera, C ^b   Baud, G ^b   Pierre Besse, J ^b  

^a UNIVERSITÉ DE OUAGADOUGOU   (Burkina Faso)

^b UNIVERSITÉ CLERMONT AUVERGNE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CAPACITORS; COMPOSITION; GERMANIUM COMPOUNDS; HEAT TREATMENT; MULTILAYERS; OPTIMIZATION; PERMITTIVITY; SPUTTERING; THERMAL CYCLING;

GERMANIUM DIOXIDE; RADIO FREQUENCY CATHODIC SPUTTERING;

RUTHERFORD BACKSCATTERING SPECTROSCOPY;

EID: 0034274081     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00184-1     Document Type: Article

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