Studies on optical and dielectric properties of Al2O 3 thin films prepared by electron beam evaporation and spray pyrolysis method

Materials Science and Engineering: B

Volumn 106, Issue 3, 2004, Pages 269-274

  Shamala, K S ^a   Murthy, L C S ^a   Rao, K Narasimha ^b  

^a BANGALORE UNIVERSITY   (India)

^b INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Al2O3 films; Electrical properties; Electron beam evaporation; Humidity sensor; Optical properties; Spray pyrolysis; Structure

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEPOSITION; ELECTRIC FIELDS; ELECTRON ABSORPTION; ELECTRON SPECTROSCOPY; EVAPORATION; OPTICAL PROPERTIES; PERMITTIVITY; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; SENSORS; SPRAYING; THIN FILMS; X RAY ANALYSIS; X RAY DIFFRACTION ANALYSIS;

AL2O3 FILMS; HUMIDITY SENSORS; SPRAY PYROLYSIS; STRUCTURE;

ALUMINUM COMPOUNDS;

EID: 1142281032     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2003.09.036     Document Type: Article

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