SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 397, Issue 1-2, 2001, Pages 276-279

Speeding-up effects of hard carbon films on surface acoustic wave on crystalline quartz

(7) Zhang, Qing a Yoon, S F a Zhgoon, S b Ligatchev, V a Ahn, J a Rusli, a Sun, Z a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b MOSCOW POWER ENGINEERING INSTITUTE (Russian Federation)

Author keywords

Carbon; Piezoelectric effect; Quartz; Silicon carbide

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; AMORPHOUS FILMS; ELASTIC MODULI; PIEZOELECTRICITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; SURFACE WAVES; VACUUM APPLICATIONS;

CRYSTALLINE QUARTZ;

DIAMOND LIKE CARBON FILMS;

EID: 0035499310 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01419-5 Document Type: Article

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.