Combinatorial discovery and optimization of amorphous HfO2 - Nb2 O5 mixture with improved transparency

Electrochemical and Solid-State Letters

Volumn 13, Issue 7, 2010, Pages

  Dabirian, Ali ^a   Kuzminykh, Yury ^a   Afra, Bamdad ^a   Harada, Scott ^a   Wagner, Estelle ^b   Sandu, Cosmin S ^a   Benvenuti, Giacomo ^b   Rushworth, Simon ^c   Muralt, Paul ^a   Hoffmann, Patrik ^a,d  

^a EPFL   (Switzerland)

^b ABCD Technology Sarl   (Switzerland)

^c SAFC Hitech   (United Kingdom)

^d SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS LAYER; HIGH REFRACTIVE INDEX; HIGH VACUUM; POLYCRYSTALLINE; ROOT MEAN SQUARES; SUBSTRATE TEMPERATURE;

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; HAFNIUM COMPOUNDS; REFRACTIVE INDEX; SPECTROSCOPIC ELLIPSOMETRY; SURFACE ROUGHNESS; TRANSPARENCY;

AMORPHOUS FILMS;

EID: 77956215145     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3407618     Document Type: Article

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