Overview about the optical properties and mechanical stress of different dielectric thin films produced by reactive-low-voltage-ion-plating

Thin Solid Films

Volumn 516, Issue 14, 2008, Pages 4587-4592

  Hallbauer, A ^a   Huber, D ^a   Strauss, G N ^a   Schlichtherle, S ^a   Kunz, A ^a   Pulker, H K ^a  

^a UNIVERSITY OF INNSBRUCK   (Austria)

Author keywords

Dielectric thin film; HfO2; Ion plating; Mechanical properties; Nb2O5; Optical properties; Ta2O5

Indexed keywords

DIELECTRIC PROPERTIES; OPTICAL PROPERTIES; PARTIAL PRESSURE; STRESS ANALYSIS;

DIELECTRIC THIN FILMS; ION PLATING; MECHANICAL FILM STRESS;

THIN FILMS;

EID: 42649103717     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.017     Document Type: Article

References (26)

1. B. Berghaus, Brit. Patent Spec. No 510993, 1938.
2. B. Berghaus, German Patent Nr. 683414, Klasse 12i, Gruppe 37, 1939.
3. Mattox D.M. Sandia Corp. Rep. SC-DR-281-63 (1963)
4. Mattox D.M. J. Vac. Sci. Technol. 10 (1973) 47
5. Mattox D.M. J. Appl. Phys. Suppl. 2 (1975) 443
6. E. Moll, H.K. Pulker, W. Haag, US Patent No. 4.619.748, 1986.
7. Pulker H.K. Coatings on Glass. 2nd revised edition (1999), Elsevier, Amsterdam
8. Swanepoel R. J. Phys. E: Sci. Instrum. 16 (1983) 1214
9. Jackson W.B., Amer N.M., Boccara A.C., and Fournier D. Appl. Opt. 20 (1981) 1333
10. Strauss G.N., Nguyen Q.D., and Pulker H.K. J. Non-Cryst. Solids 218 (1997) 256
11. Strauss G.N., Lechner W., and Pulker H.K. Thin Solid Films 351 (1999) 53
12. Hallbauer A., Huber D., and Pulker H.K. In: Amra C., Kaiser N., and Macleod H.A. (Eds). Proceedings SPIE - Advances in Optical Thin Films II vol. 5963 (2005), SPIE, Bellingham 5963 0G
13. Kunz A., Hallbauer A., Huber D., and Pulker H.K. Vak. Forsch. Prax. 18 (2006) 12 (in German)
14. A. Kunz, diploma thesis, University of Innsbruck, Austria, 2006 (in German).
15. Schlichtherle S., Huber D., and Pulker H.K. Vak. Forsch. Prax. 15 (2003) 83
16. Carter G. J. Phys., D, Appl. Phys. 27 (1994) 1046
17. Strauss G.N. In: Kaiser N., and Pulker H.K. (Eds). Optical Interference Coatings (2003), Springer, Berlin 207
18. Hallbauer A., Huber D., Klauser F., Kunz A., Tessadri R., Kaiser U., Yulin S., and Pulker H.K. Plasma Process. Polym. 4 (2007) 53
19. W. Lechner, Ph.D. thesis, University of Innsbruck, Austria, 1999 (in German).
20. Richter F., Kupfer H., Schlott P., Gessner T., and Kaufmann C. Thin Solid Films 389 (2001) 278
21. Cheng W.H., Chi S.F., and Chu A.K. Thin Solid Films 347 (1999) 233
22. Kupfer H., Flügel T., Richter F., and Schlott P. Surf. Coat Technol. 116-119 (1999) 116
23. Ehlers H., Becker K., Beckmann R., Beermann N., Brauneck U., Fuhrberg P., Gäbler D., Jakobs S., Kaiser N., Kennedy M., König F., Laux S., Müller J.C., Rau B., and Riggers W. In: Amra C., Kaiser N., and Macleod H.A. (Eds). Proceedings SPIE - Advances in Optical Thin Films vol. 5250 (2004) 646
24. Thielsch R., Gatto A., Heber J., and Kasier N. Thin Solid Films 410 (2001) 86
25. McNally J.J., Al-Jumaily G.A., and McNeil J.R. J. Vac. Sci. Technol., A, Vac. Surf. Films 4 (1986) 437
26. Liu W.-J., Guo X.-J., and Chien C.-H. Surf. Coat. Technol. 196 (2005) 69