Creep in piezoelectric scanners of atomic force microscopes

Proceedings of the American Control Conference

Volumn 5, Issue , 2002, Pages 3777-3782

  El Rifai, Osamah M ^a   Youcef Toumi, Kamal ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LINEAR TIME INVARIANT FILTER; LINEAR TIME INVARIANT MODEL; PIEZOELECTRIC ACTUATOR; PIEZOELECTRIC SCANNER;

ATOMIC FORCE MICROSCOPY; CLOSED LOOP CONTROL SYSTEMS; CREEP; LINEAR CONTROL SYSTEMS; MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; RESONANCE;

ACTUATORS;

EID: 0036058571     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2002.1024515     Document Type: Conference Paper

References (3)

1. Observation of zero creep in piezoelectric actuators
2. Creep characteristics of piezoelectric actuators
3. Compensation method based on formularizing hysteresis of piezoelectric tube scanner