A 2-D micromachined SOI MEMS mirror with sidewall electrodes for biomedical imaging

IEEE/ASME Transactions on Mechatronics

Volumn 15, Issue 4, 2010, Pages 501-510

  Bai, Yanhui ^a   Yeow, John T W ^a   Constantinou, Paul ^b   Damaskinos, Savvas ^a,b   Wilson, Brian C ^c  

^a UNIVERSITY OF WATERLOO   (Canada)

^b Biomedical Photometrics Inc   (Canada)

^c UNIVERSITY OF TORONTO   (Canada)

Author keywords

MACROscope; microelectromechanical systems (MEMS); micromirror; serpentine; sidewall (SW); silicon on insulator (SOI)

Indexed keywords

BIOMEDICAL IMAGING; BOTTOM ELECTRODES; DRIVE VOLTAGE; DRIVING VOLTAGES; FABRICATION PROCESS; HIGH ASPECT RATIO; MEMS MIRRORS; MICRO MIRROR; MICROELECTROMECHANICAL SYSTEMS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMACHINED; SCANNING ANGLES; SHADOW MASK; SIDEWALL ELECTRODES; SILICON-ON-INSULATORS; SOI WAFERS; SOI-MEMS; STATIC AND DYNAMIC; TORSION BAR;

ACTUATORS; ASPECT RATIO; ELECTRODES; ELECTROSTATIC ACTUATORS; MECHATRONICS; MEDICAL IMAGING; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; SERPENTINE; SILICATE MINERALS; SILICON WAFERS;

COMPOSITE MICROMECHANICS;

EID: 77955227062     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2010.2051451     Document Type: Article

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