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Volumn 28, Issue 8, 2003, Pages 628-630
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Electrostatic micromachine scanning mirror for optical coherence tomography
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
CAPACITORS;
HINGES;
MICROMACHINING;
MIRRORS;
SCANNING;
SILICON WAFERS;
TOMOGRAPHY;
ELECTROSTATIC MICROMACHINES;
COHERENT LIGHT;
ARTICLE;
ELECTRICITY;
INSTRUMENTATION;
TOMOGRAPHY;
ELECTRICITY;
TOMOGRAPHY;
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EID: 0037446956
PISSN: 01469592
EISSN: None
Source Type: Journal
DOI: 10.1364/OL.28.000628 Document Type: Article |
Times cited : (109)
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References (13)
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