Electrostatic 1D micro scanner with vertical combs for HD resolution display

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6466, Issue , 2007, Pages

  Cho, Jin Woo ^a   Park, Yong Hwa ^a   Ko, Young Chul ^a   Lee, Byeung Leul ^a   Kang, Seok Jin ^a   Chung, Seok Whan ^a   Choi, Won Kyoung ^a   Cho, Yong Chul ^a   Chang, Seok Mo ^a   Lee, Jin Ho ^a   Sunu, John ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Comb drive; Dynamic deformation; Laser display; Optical MEMS; Portable projector; Scanner

Indexed keywords

ALGORITHMS; FEEDBACK CONTROL; FINITE ELEMENT METHOD; OPTICAL PROJECTORS; OPTICAL RESOLVING POWER; SCANNING;

COMB DRIVES; DYNAMIC DEFORMATION; LASER DISPLAYS; OPTICAL MEMS; PORTABLE PROJECTORS;

MIRRORS;

EID: 34247373151     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.702163     Document Type: Conference Paper

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