Design and fabrication of a MEMS mirror for miniature laser projection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7208, Issue , 2009, Pages

  Sanders, René ^a   Van Lierop, Diederik ^a   De Jong, Boudewijn ^a   Soemers, Herman ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Laser display; Mems mirror; Pocket projector

Indexed keywords

CRITICAL PARAMETER; DYNAMICAL BEHAVIORS; INNOVATIVE DESIGN; LASER DISPLAY; LOW COSTS; MANUFACTURABILITY; MEMS MIRROR; MEMS MIRRORS; MINIATURE LASERS; OUT-OF-PLANE; POCKET PROJECTOR; PROCESS STEPS; RESONANCE MODE; RESONANT MODE;

LASERS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL PROJECTORS;

MIRRORS;

EID: 67649277747     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.807639     Document Type: Conference Paper

References (24)

1. Y. Park et.al., " Perspective of MEMS based raster scanning display and its requirements for success", Proc. SPIE vol 6114 (2006).
2. Hakan Urey and David Dickensheets, Display and Imaging Systems, Ch. 8 in MOEMS and Applications, E. Motamedi, Editor, SPIE Press (2005)
3. Hakan Urey, " MEMS Scanners for Display and Imaging Applications", Proc. of SPIE Vol. 5604 (2004)
4. Hakan Urey, " Torsional Scanner Design for high-resolution display systems", Optical Scanning II, Proc SPEI vol 4773, pp27-37 (2002)
5. Schenk H, Diirr P, Kunze D, Kück H, " A new driving principle for micromechanical torsional actuators", Micro-electro-mechanical systems (MEMS) 1999., New York, NY: American Society of Mechanical Engineers, 1999, vol. 1 pp. 333-338
6. Arda D. Yalcinkaya, Hakan Urey, Dean Brown, Tom Montague, Randy Sprague, " Two-Axis Electromagnetic Microscanner for High Resolution Displays", journal of microelectromechanical systems, vol. 15, no. 4, august 2006
7. H. Schenk, " A resonantly excited 2D-micro-scanning-mirror with large deflection", Sensors and Actuators A 89 (2001) 104-111
8. S.-T. Hsu, T. Klose, C. Drabe, A. Wolter, and H. Schenk, " Ultra flat high resolution microscanners," in Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on, pp. 197-198, Aug. 12 2007-July 16 2007.
9. Chang-Hyeon Ji et.al. " An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame", J. Micromech. Microeng. 16 (2006) 1033-1039
10. A. Wolter et.al., " Scanning 2D micromirror with enhanced flatness at high frequency" Proc. Of SPIE vol.6114 (2006)
11. K. Roscher, " Low-cost projection device with a 2D resonant microscanning mirror" Proc. SPIE Vol. 5348 (2004) p. 22-31
12. Young-Chul Ko et.al., " Eye-type scanning mirror with dual vertical combs for laser display", Sensors and Actuators A 126 (2006) 218-226
13. Shu-Ting Hsu et.al. " Two dimensional microscanners with large horizontal-vertical scanning frequency ratio for high resolution laser projectors", Proc. of SPIE Vol. 6887 (2008)
14. Il Woong Jung et.al. " High Fill-Factor Two-Axis Gimbaled Tip-Tilt-Piston Micromirror Array Actuated by Self-Aligned Vertical Electrostatic Combdrives", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 3, JUNE 2006
15. A. Wolter, "Torsional stress, fatigue and fracture strength in silicon hinges of a micro scanning mirror", Reliability, Testing, and Characterization of MEMS/MOEMS III, Proceedings of SPIE Vol. 5343 (2004)
16. Ulrich Hofmann, " Wafer-level vacuum packaged micro-scanning mirrors for compact laser projection displays", SPIE Proc. Vol. 6887 (2008)
17. Gary K. Fedder, " Technologies for Cofabricating MEMS and Electronics", Proceedings of the IEEE | Vol. 96, No. 2, February 2008
18. Xiao-Hui Xu, Bao-Qing Li, Yan Feng and Jia-Ru Chu, " Design, fabrication and characterization of a bulk-PZT-actuated MEMS de formable mirror", J. Micromech. Microeng. 17 (2007) 2439-2446
19. Ankur Jain, " A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography", IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, VOL. 10, NO. 3, MAY/JUNE 2004
20. Caglar Ataman, " Nonlinear Frequency Response of Comb-Driven Microscanners", MOEMS Display and Imaging Systems II", Proc.SPIE Vol.5348 (2004)
21. Mita M, Mita Y, Toshiyoshi H, " Multiple height microstructures fabricated by ICP-RIE and Embedded Masking layers", http://www.iee.or.jp/trans/pdf/2000/0011E493.pdf
22. Madou Mark J., " Fundamentals of Microfabrication ", Second Edition, CRC Press, 2002
23. http://www.silexmicrosystems.com
24. http://www.polytec.com