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Volumn 15, Issue 4, 2005, Pages 736-746

Analysis, simulation and relative performances of two kinds of serpentine springs

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; SERPENTINE; STRUCTURAL DESIGN; STRUCTURAL LOADS;

EID: 17444367726     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/4/010     Document Type: Article
Times cited : (73)

References (12)
  • 6
    • 0242406148 scopus 로고    scopus 로고
    • A design methodology for a bulk-micromachined two-dimensional electrostatic micromirror
    • Hao Z, Wingfield B, Whitley M, Brooks J and Hammer J A 2003 A design methodology for a bulk-micromachined two-dimensional electrostatic micromirror J. Microelectromech. Syst. 12 692-701
    • (2003) J. Microelectromech. Syst. , vol.12 , pp. 692-701
    • Hao, Z.1    Wingfield, B.2    Whitley, M.3    Brooks, J.4    Hammer, J.A.5
  • 7
    • 0037231433 scopus 로고    scopus 로고
    • Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction
    • Galayko D, Kaiser A, Buchaillot L, Legrand B, Collard D and Combi C 2003 Design, realization and testing of micro-mechanical resonators in thick-film silicon technology with postprocess electrode-to-resonator gap reduction J. Micromech. Microeng. 13 134-40
    • (2003) J. Micromech. Microeng. , vol.13 , pp. 134-140
    • Galayko, D.1    Kaiser, A.2    Buchaillot, L.3    Legrand, B.4    Collard, D.5    Combi, C.6
  • 8
    • 17444384420 scopus 로고    scopus 로고
    • http://www.europractice.bosch.com/en/start/index.htm
  • 11
    • 0742269316 scopus 로고    scopus 로고
    • Analytical behavior of rectangular electrostatic torsion actuators with nonlinear spring bending
    • Xiao Z, Peng W and Farmer K R 2003 Analytical behavior of rectangular electrostatic torsion actuators with nonlinear spring bending J. Microelectromech. Syst. 12 929-36
    • (2003) J. Microelectromech. Syst. , vol.12 , pp. 929-936
    • Xiao, Z.1    Peng, W.2    Farmer, K.R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.