Electrically coupled MEMS bandpass filters: Part I: With coupling element

Sensors and Actuators, A: Physical

Volumn 122, Issue 2, 2005, Pages 307-316

  Pourkamali, Siavash ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Coupling; HARPSS; Micromechanical filter; Microresonator; Quality factor

Indexed keywords

AMPLIFICATION; BANDWIDTH; CAPACITORS; COUPLED CIRCUITS; MICROELECTROMECHANICAL DEVICES; RESONATORS;

COUPLING; HARPSS; MICROMECHANICAL FILTERS; MICRORESONATORS; QUALITY FACTORS;

BANDPASS FILTERS;

EID: 23344448511     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.038     Document Type: Article

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