Sliding-mode control of a three-degrees-of-freedom nanopositioner

Asian Journal of Control

Volumn 10, Issue 3, 2008, Pages 267-276

  Shen, Jing Chung ^a   Jywe, Wen Yuh ^a   Liu, Chien Hung ^a   Jian, Yu Te ^a   Yang, Jeffrey ^a  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

Author keywords

Hysteresis; Nanopositioner.; Precision, nonlinear; Sliding mode control

Indexed keywords

CAPACITIVE SENSORS; CONTROLLERS; DEGREES OF FREEDOM (MECHANICS); HYSTERESIS; LINEAR SYSTEMS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; PROPORTIONAL CONTROL SYSTEMS; SLIDING MODE CONTROL; TWO TERM CONTROL SYSTEMS;

ESTIMATION AND COMPENSATION; HYSTERESIS NON LINEARITIES; LINEAR SYSTEM MODEL; NANO-POSITIONER; OPEN LOOP CHARACTERISTIC; PRECISION, NONLINEAR; PROPORTIONAL INTEGRAL DERIVATIVE CONTROLLERS; THREE DEGREES OF FREEDOM;

FEEDBACK;

EID: 56149087183     PISSN: 15618625     EISSN: None     Source Type: Journal    
DOI: 10.1002/asjc.33     Document Type: Article

References (17)

1. Gao P. and S. M. Swei, " A six-degree-of-freedom micro-manipulator based on piezoelectric translators, " Nanotechnology, Vol. 10, pp. 447-452 (1999).
2. Seugling, R. M., T. LeBrun, S. T. Smith, and L. P. Howard, " A six-degree-of-freedom precision motion stage," Rev. Set Lustrum., Vol. 73, No. 6, pp. 2462-2468 (2002).
3. zpiezo-micropositioner part I: design and analysis," IEEE Trans. Ultrason., Ferroelect, Freq. Control, Vol. 46, No. 4, pp. 897-905 (1999).
4. z piezo-micropositioner part II: experiment and performance, " IEEE Trans. Ultrason., Ferroelect., Freq. Control, Vol. 46, No. 4, pp. 906-912 (1999).
5. Ku, S. S., U. Pinsopon, S. Cetinkunt, and S. Nakajima, " Design, fabrication, and realtime neural network control of a three-degrees-of-freedom nanopositioner," IEEE/ASME Trans. Mechatron., Vol. 5, pp. 273-280 (2000).
6. Hwang, C. L. and C. Jan, " A reinforcement discrete neuro-adaptive control for unknown piezoelectric actuator systems with dominant hysteresis, " IEEE Trans. Neural Netw., Vol. 14, pp. 66-78 (2003).
7. Ge, P., and M. Jouaneh, " Tracking control of a piezoceramic actuator," IEEE Trans. Control Syst. Technol, Vol. 4, pp. 209-216 (1996).
8. Ge, P., and M. Jouaneh, " Generalized preisach model for hysteresis nonlinearity of piezoceramic actuators," Precis. Eng., Vol. 20, pp. 99-111 (1997).
9. Cruz-Hernandez, J., and V. Hayward, " Phase control approach to hysteresis reduction," IEEE Trans. Control Syst. Technol., Vol. 9, pp. 17-26 (2001).
10. Huang, Y. C. and D. Y. Lin, " Ultra-fine tracking control on piezoelectric actuated motion stage using piezoelectric hysteretic model," Asian J. Control, Vol. 6, pp. 208-216 (2004).
11. Tao, G., and P. V. Kokotovic, " Adaptive control of plants with unknown hysteresis," IEEE Trans. Autom. Control, Vol, 40, pp. 200-212 (1995).
12. Xu, J. H., " Neural network control of a piezo tool positioner," Proc. Canadian Conf. Elect. Comput. Eng., pp. 333-336 (1993).
13. Hwang, C. L., C. Jan, and Y. H. Chen, " Piezo-mechanics using intelligent variable-structure control," IEEE Trans. Ind. Electron., Vol. 48, pp. 47-59 (2001).
14. ∞ control and sliding mode control of magnetic levitation system," Asian J. Control, Vol. 4, pp. 333-340 (2002).
15. Utkin, V, J. Guldner, and J. Shi, Sliding Mode Control in Electromechanical Systems, Taylor & Francis, Padstow (1999).
16. Jywe, W. Y, J. C. Shen, Y. F. Teng, C. H. Liu, and Y. T. Jian, " Development of a flexure hinge based stack-type five-degree-of-freedom nanometer positioning stage," J. Chin. Inst. Mech. Eng., Vol. 25, No. 6, pp. 465-174 (2004).
17. Shen, J. C, " New tuning method for PID controller," ISA Trans., Vol. 41, pp. 473-484 (2002).