Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors

Journal of Micromechanics and Microengineering

Volumn 16, Issue 12, 2006, Pages 2747-2754

  Xu, H G ^a   Ono, T ^a   Esashi, M ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; FEEDBACK CONTROL; HYSTERESIS; LEAD COMPOUNDS; SENSITIVITY ANALYSIS; SENSORS;

FEEDBACK SIGNALS; INTEGRAL TIME CONSTANT; INTEGRATED CAPACITIVE DISPLACEMENT SENSORS;

MOTION COMPENSATION;

EID: 33846096768     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/12/031     Document Type: Article

References (17)

1. Wu Y, Zhou Z and Tan X 2001 A flexture hinge mechanism meets the demand for XY motion mechanism driven by one piezoelectric element J. Micromech. 1 299-310
2. Gao P, Swei S M and Yuan Z 1999 A new piezodriven precision micropositioning stage utilizing flexure hinges Nanotechnology 10 394-8
3. Choi S B, Han S S and Lee Y S 2005 Fine motion control of a moving stage using a piezoactuator associated with a displacement amplifier Smart Mater. Struct. 14 222-30
4. Zhang D, Chang C, Ono T and Esashi M 2003 A piezodriven XY-microstage for multiprobe manorecording Sensors and Actuators A 108 230-3
5. Zhang D, Ono T and Esashi M 2005 Piezoactuator-integrated monolithic microstage with six degrees of freedom Sensors and Actuators A 122 301-6
6. Xu H G, Okamoto K, Zhang D Y, Ono T and Esashi M 2005 Development of monolithic PZT microstage for the application of ultra high-density data storage Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Seoul: Korea) pp 717-20
7. Xu H G, Zhang D Y, Ono T and Esashi M 2006 Fabrication and characterizations of a monolithic PZT microstage Microsyst. Technol. 12 883-90
8. Dragan D 2005 The Science of Hysteresis vol 3 ed Mayergoyz I and Bertotti G (Amsterdam: Elsevier) p 337
9. Vautier B J and Moheimani S O 2005 Charge driven piezoelectric actuators for structural vibration control: issues and implementation Smart Mater. Struct. 14 575-86
10. Croft D, Shed G and Devasia S 2001 Creep, Hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application J. Dyn. Syst. Meas. Control 123 35-43
11. Song G, Zhao J, Zhou X and Alexis J 2005 Tracking control of a piezoceramic actuator with Hysteresis compensation using inverse Preisach model IEEE/ASME Trans. Mechatronic 10 198-209
12. Ru C, Sun L and Wang K 2006 An adaptive inverse method of control for a piezoelectric actuator Smart Mater. Struct. 15 14-8
13. Schitter G, Menold P, Knapp H F, Allgowerb F and Stemmer A 2001 High performance feedback for fast scanning atomic force microscopes Rev. Sci. Instrum. 72 3320-7
14. Xue X and Tang J 2006 Robust and high precision control using piezoelectric actuator circuit and integral continuous sliding mode control design J. Sound Vib. 293 335-59
15. Heerens W 1986 Application of capacitance techniques in sensor design J. Phys. E: Sci. Instrum. 19 897-906
16. Puers R 1993 Capacitive sensors: When and how to use them Sensors Actuators A 37-38 93-105
17. Astrom K J and Hagglund H 1995 PID Controllers: Theory, Design, and Tuning 2nd edn (Research Triangle Park, NC: Instrument Society of America)