An integrator-backstepping-based dynamic surface control method for a two-axis piezoelectric micropositioning stage

IEEE Transactions on Control Systems Technology

Volumn 15, Issue 5 SPEC. ISS., 2007, Pages 916-926

  Shieh, Hsin Jang ^a   Hsu, Chia Hsiang ^a,b  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

^b Merry Electronics Co Ltd   (Taiwan)

Author keywords

Dynamic surface control; Hysteresis; Integrator backstepping; Piezoelectric positioning stage

Indexed keywords

APPLIED VOLTAGES; CONTROL METHODS; CROSS COUPLINGS; DYNAMIC PERFORMANCE; DYNAMIC SURFACE CONTROL; INTEGRATOR BACKSTEPPING; LINEAR VISCOUS; MASS-SPRING SYSTEMS; MATHEMATICAL EQUATIONS; MECHANICAL BENDING; MICRO-POSITIONING; MOTION DYNAMICS; PARAMETER VARIATIONS; PIEZOELECTRIC POSITIONING STAGE; STATE-SPACE MODELS; TIME RESPONSE; TRAJECTORY TRACKING; TRAJECTORY TRACKING ERRORS; TWO-AXIS;

COMPUTER CONTROL SYSTEMS; EQUATIONS OF MOTION; EQUATIONS OF STATE; HYSTERESIS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; VIBRATIONS (MECHANICAL);

BACKSTEPPING;

EID: 56349124244     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2006.890290     Document Type: Article

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