Advanced transmission electron microscope triboprobe with automated closed-loop nanopositioning

Measurement Science and Technology

Volumn 21, Issue 7, 2010, Pages

  Lockwood, A J ^a   Wedekind, J ^b   Gay, R S ^a   Bobji, M S ^c   Amavasai, B ^b   Howarth, M ^b   Mobus G ^a   Inkson, B J ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

^b SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

^c INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Closed loop control; In situ TEM; Nano fatigue; Nano friction; Triboprobe

Indexed keywords

FRICTION; SOFTWARE TESTING; TRANSMISSION ELECTRON MICROSCOPY;

CLOSED-LOOP CONTROL; DESIGN AND OPERATIONS; IN-SITU ELECTRON MICROSCOPY; IN-SITU TEM; INSTRUMENTATION DESIGNS; NANO-SCALE MATERIALS; POSITIONING PERFORMANCE; TRIBOPROBE;

ELECTRONS;

EID: 77953762754     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/21/7/075901     Document Type: Article

References (31)

1. Messerschmidt U and Appel F 1976 Quantitative tensile-tilting stages for the high voltage electron microscope Ultramicroscopy 1 223-30
2. Kizuka T et al 1997 Cross-sectional time-resolved high-resolution transmission electron microscopy of atomic-scale contact and noncontact-type scannings on gold surfaces Phys. Rev. B 55 R7398
3. Svensson K et al 2003 Compact design of a transmission electron microscope-scanning tunneling microscope holder with three-dimensional coarse motion Rev. Sci. Instrum. 74 4945-7
4. Wall M A and Dahmen U 1998 An in-situ nanoindentation specimen holder for a high voltage transmission electron microscope Microsc. Res. Tech. 42 248-54
5. Stach E A et al 2001 Development of a nanoindenter for in situ transmission electron microscopy Microsc. Microanal. 7 507-17
6. Bobji M S et al 2006 A miniaturized TEM nanoindenter for studying material deformation in situ Meas. Sci. Technol. 17 1324-9
7. Bobji M S, Pethica J B and Inkson B J 2005 Indentation mechanics of Cu-Be quantified by an in situ transmission electron microscopy mechanical probe J. Mater. Res. 20 2726-32
8. Binnig G, Quate C F and Gerber C 1986 Atomic force microscope Phys. Rev. Lett. 56 930
9. Buerkle A et al 2001 Vision-based closed-loop control of mobile microrobots for microhandling tasks Proc. SPIE 4568 187-98
10. Fahlbusch S et al 2005 Nanomanipulation in a scanning electron microscope J. Mater. Process. Technol. 167 371-82
11. Saeidpourazar R and Jalili N 2008 Towards fused vision and force robust feedback control of nanorobotic-based manipulation and grasping Mechatronics 18 566-77
12. Klocke Klocke Nanotechnik, Aachen available at http://www.nanomotor.de/ (accessed on 8 January 2010)
13. Ohnishi H, Kondo Y and Takayanagi K 1998 UHV electron microscope and simultaneous STM observation of gold stepped surfaces Surf. Sci. 415 L1061-4
14. Hysitron PI 95 TEM PicoIndenter available at http://www.hysitron.com/ page-attachments/0000/0517/PI-95-TEM-PicoIndenter-in-situ-instrument.pdf (accessed on 27 November 2009)
15. DeHosson J T M et al 2006 In situ TEM nanoindentation and dislocation-grain boundary interactions: a tribute to David Brandon J. Mater. Sci. 41 7704-19
16. Lockwood A J and Inkson B J 2009 In-situ TEM nanoindentation and deformation of Si-nanoparticle clusters J. Phys. D: Appl. Phys. 42 035410
17. Wang J J et al 2009 The formation of carbon nanostructures by in situ TEM mechanical nanoscale fatigue and fracture of carbon thin films Nanotechnology 20 305703
18. Golberg D et al 2006 In situ electrical probing and bias-mediated manipulation of dielectric nanotubes in a high-resolution transmission electron microscope Appl. Phys. Lett. 88 123101
19. Liu X et al 2008 In situ electrical measurements of polytypic silver nanowires Nanotechnology 19 085711
20. Lantz M A et al 2007 A vibration resistant nanopositioner for mobile parallel-probe storage applications J. Microelectromech. Syst. 16 130
21. Meyer C et al 2005 Slip-stick step-scanner for scanning probe microscopy Rev. Sci. Instrum. 76 063706
22. Lockwood A J et al 2008 Characterising performance of TEM compatible nanomanipulation slip-stick inertial sliders against gravity J. Phys.: Conf. Ser. 126 012096
23. Woern H et al 2000 Flexible microrobots for micro assembly tasks Proc. 2000 Int. Symp. on Micromechatronics and Human Science, 2000. MHS 2000 (Nagoya, Japan) pp 135-43 (doi:10.1109/MHS.2000.903303)
24. Fatikow S et al 2000 A flexible microrobot-based microassembly station J. Intell. Robot. Syst. 27 135-69
25. Renner C et al 1990 A vertical piezoelectric inertial slider Rev. Sci. Instrum. 63 965-7
26. Chan E K and Dutton R W 2000 Electrostatic micromechanical actuator with extended range of travel J. Microelectromech. Syst. 9 321-8
27. Horsley D A et al 1999 Precision positioning using a microfabricated electrostatic actuator IEEE Trans. Magn. 35 993-9
28. Wang J J et al 2008 Characterising ambient and vacuum performance of a miniaturised TEM nanoindenter for in-situ material deformation J. Phys.: Conf. Ser. 126 012095
29. Devasia S, Eleftheriou E and Moheimani S O R 2007 A survey of control issues in nanopositioning IEEE Trans. Control Syst. Technol. 15 802-23
30. Lockwood A J et al 2010 Cyclic deformation and nano-contact adhesion of MEMS nano-bridges by in-situ TEM nanomechanical testing J. Phys.: Conf. Ser. at press
31. Milne R, Lockwood A J and Inkson B J 2010 In-situ TEM deformation of aluminium nanopillars J. Phys.: Conf. Ser. at press