Cyclic deformation and nano-contact adhesion of MEMS nano-bridges by in-situ TEM nanomechanical testing

Journal of Physics: Conference Series

Volumn 241, Issue , 2010, Pages

  Lockwood, A J ^a   Bobji, M S ^b   Bunyan, R J T ^c   Inkson, T J ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

^b INDIAN INSTITUTE OF SCIENCE   (India)

^c QINETIQ   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL TESTING; POLYCRYSTALLINE MATERIALS; POLYSILICON; UNLOADING;

ADHESIVE CONTACT; CARBON CONTAMINATION; CARBON MIGRATION; CONTACT HEATING; CYCLIC DEFORMATIONS; INDENTATION DEPTH; NANOMECHANICAL TESTING; NUMBER OF CYCLES;

PROBES;

EID: 77953774831     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/241/1/012056     Document Type: Conference Paper

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