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Applied Physics Letters

Volumn 96, Issue 23, 2010, Pages

Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors

(4) Valle C a Gonon, P a Jorel, C a El Kamel, F b

a Université Joseph Fourier (France)

b UNIVERSITY OF TUNIS EL MANAR (Tunisia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODE OXIDATION; METAL ELECTRODES; METAL WORK FUNCTION; METAL-INSULATOR-METAL CAPACITORS; METALLIC ELECTRODES; NON-LINEARITY; NONLINEAR BEHAVIOR; OXYGEN AFFINITY; QUADRATIC COEFFICIENTS; VOLTAGE NONLINEARITIES;

CAPACITANCE; CAPACITORS; ELECTRODES; ELECTROLYTIC CAPACITORS; HAFNIUM COMPOUNDS; METAL INSULATOR BOUNDARIES; METALS; MIM DEVICES; OXYGEN; SEMICONDUCTOR INSULATOR BOUNDARIES; WORK FUNCTION;

OXYGEN VACANCIES;

EID: 77953489538 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3447795 Document Type: Article

Times cited : (41)

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