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Volumn 96, Issue 23, 2010, Pages

Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODE OXIDATION; METAL ELECTRODES; METAL WORK FUNCTION; METAL-INSULATOR-METAL CAPACITORS; METALLIC ELECTRODES; NON-LINEARITY; NONLINEAR BEHAVIOR; OXYGEN AFFINITY; QUADRATIC COEFFICIENTS; VOLTAGE NONLINEARITIES;

EID: 77953489538     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3447795     Document Type: Article
Times cited : (42)

References (22)
  • 1
    • 77953485011 scopus 로고    scopus 로고
    • International Technology Roadmafor Semiconductors Ed.
    • International Technology Roadmap for Semiconductors 2007 Ed., http://www.itrs.net/
    • (2007)
  • 4
    • 31944442924 scopus 로고    scopus 로고
    • Microscopic model for dielectric constant in metal-insulator-metal capacitors with high-permittivity metallic oxides
    • DOI 10.1063/1.2170137, 052902
    • S. B́cu, S. Cŕmer, and J. -L. Autran, Appl. Phys. Lett. APPLAB 0003-6951 88, 052902 (2006). 10.1063/1.2170137 (Pubitemid 43190894)
    • (2006) Applied Physics Letters , vol.88 , Issue.5 , pp. 1-3
    • Bcu, S.1    Crmer, S.2    Autran, J.-L.3
  • 5
    • 34047246671 scopus 로고    scopus 로고
    • Modeling of nonlinearities in the capacitance-voltage characteristics of high- k metal-insulator-metal capacitors
    • DOI 10.1063/1.2719618
    • P. Gonon and C. Valĺe, Appl. Phys. Lett. APPLAB 0003-6951 90, 142906 (2007). 10.1063/1.2719618 (Pubitemid 46550125)
    • (2007) Applied Physics Letters , vol.90 , Issue.14 , pp. 142906
    • Gonon, P.1    Vallae, C.2
  • 6
    • 35548945757 scopus 로고    scopus 로고
    • Nonlinear capacitance variations in amorphous oxide metal-insulator-metal structures
    • DOI 10.1063/1.2800291
    • S. Blonkowski, Appl. Phys. Lett. APPLAB 0003-6951 91, 172903 (2007). 10.1063/1.2800291 (Pubitemid 350015262)
    • (2007) Applied Physics Letters , vol.91 , Issue.17 , pp. 172903
    • Blonkowski, S.1
  • 12
    • 35549008485 scopus 로고    scopus 로고
    • Experimental evidence for the role of electrodes and oxygen vacancies in voltage nonlinearities observed in high- k metal-insulator-metal capacitors
    • DOI 10.1063/1.2803221
    • F. El Kamel, P. Gonon, and C. Valĺe, Appl. Phys. Lett. APPLAB 0003-6951 91, 172909 (2007). 10.1063/1.2803221 (Pubitemid 350015267)
    • (2007) Applied Physics Letters , vol.91 , Issue.17 , pp. 172909
    • El Kamel, F.1    Gonon, P.2    Valle, C.3
  • 14
    • 34848861772 scopus 로고    scopus 로고
    • Fermi level pinning by defects in Hf O2 -metal gate stacks
    • DOI 10.1063/1.2790479
    • J. Robertson, O. Sharia, and A. A. Demkov, Appl. Phys. Lett. APPLAB 0003-6951 91, 132912 (2007). 10.1063/1.2790479 (Pubitemid 47502599)
    • (2007) Applied Physics Letters , vol.91 , Issue.13 , pp. 132912
    • Robertson, J.1    Sharia, O.2    Demkov, A.A.3
  • 15
    • 38049035351 scopus 로고    scopus 로고
    • APPLAB 0003-6951,. 10.1063/1.2828703
    • S. Guha and P. Solomon, Appl. Phys. Lett. APPLAB 0003-6951 92, 012909 (2008). 10.1063/1.2828703
    • (2008) Appl. Phys. Lett. , vol.92 , pp. 012909
    • Guha, S.1    Solomon, P.2
  • 16
    • 41349102982 scopus 로고    scopus 로고
    • Influence of oxygen vacancies on Schottky contacts to ZnO
    • DOI 10.1063/1.2894568
    • M. W. Allen and S. M. Durbin, Appl. Phys. Lett. APPLAB 0003-6951 92, 122110 (2008). 10.1063/1.2894568 (Pubitemid 351451644)
    • (2008) Applied Physics Letters , vol.92 , Issue.12 , pp. 122110
    • Allen, M.W.1    Durbin, S.M.2
  • 20
    • 0030671739 scopus 로고    scopus 로고
    • SSREDI 0167-5729,. 10.1016/S0167-5729(96)00011-8
    • C. T. Campbell, Surf. Sci. Rep. SSREDI 0167-5729 27, 1 (1997). 10.1016/S0167-5729(96)00011-8
    • (1997) Surf. Sci. Rep. , vol.27 , pp. 1
    • Campbell, C.T.1
  • 21
    • 0017556846 scopus 로고
    • Work function of the elements and its periodicity
    • DOI 10.1063/1.323539
    • H. B. Michaelson, J. Appl. Phys. JAPIAU 0021-8979 48, 4729 (1977). 10.1063/1.323539 (Pubitemid 8557760)
    • (1977) Journal of Applied Physics , vol.48 , Issue.11 , pp. 4729-4733
    • Michaelson Herbert, B.1


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