High-Temperature Leakage Improvement in Metal-Insulator-Metal Capacitors by Work-Function Tuning

IEEE Electron Device Letters

Volumn 28, Issue 3, 2007, Pages 235-237

  Chiang, K C ^a   Chin, Albert ^a   Cheng, C H ^a   Chou, C P ^a   Pan, H C ^b   Hsiao, C N ^b   Hwang, H L ^c  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

^c NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Capacitor; high temperature; metal insulator metal (MIM); Ni; thermal leakage

Indexed keywords

EID: 85008035323     PISSN: 07413106     EISSN: 15580563     Source Type: Journal    
DOI: 10.1109/LED.2007.891265     Document Type: Article

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