Microscopic model for dielectric constant in metal-insulator-metal capacitors with high-permittivity metallic oxides

Applied Physics Letters

Volumn 88, Issue 5, 2006, Pages 1-3

  B́cu, St́phane ^a   Cŕmer, Śbastien ^a   Autran, Jean Luc ^b  

^a STMICROELECTRONICS   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC FIELDS; METALLIC COMPOUNDS; PERMITTIVITY; THERMAL EFFECTS;

DIELECTRIC CONSTANT VARIATIONS; METAL-INSULATOR-METAL (MIM) CAPACITORS; METALLIC CATION DISPLACEMENT; MICROSCOPIC MODEL;

CAPACITORS;

EID: 31944442924     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2170137     Document Type: Article

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