Growth and characterization of stoichiometric BCN films on highly oriented pyrolytic graphite by radiofrequency plasma enhanced chemical vapor deposition

Thin Solid Films

Volumn 518, Issue 15, 2010, Pages 4163-4169

  Mannan, Md Abdul ^a,b   Noguchi, Hideyuki ^a   Kida, Tetsuya ^a   Nagano, Masamitsu ^a   Hirao, Norie ^b   Baba, Yuji ^b  

^a SAGA UNIVERSITY   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

Hexagonal boron carbonitride; Near edge X ray absorption fine structure; Synchrotron radiation; Tris (dimethylamino)borane; X ray photoelectron spectroscopy

Indexed keywords

ATOMIC COMPOSITIONS; B ATOMS; BCN FILMS; BORON CARBO-NITRIDE; CHEMICAL ENVIRONMENT; CRYSTALLINE STRUCTURE; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; HIGHLY ORIENTED PYROLYTIC GRAPHITE; HYBRID CONFIGURATIONS; HYBRID FILM; HYBRID ORBITALS; MICROMETER SCALE; NEAR EDGE X-RAY ABSORPTION FINE STRUCTURES; NEAR-EDGE X-RAY ABSORPTION FINE STRUCTURE; RADIO-FREQUENCY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTRA; RAMAN SPECTROSCOPIC; SINGLE-SOURCE MOLECULAR PRECURSORS; TYPICAL SAMPLES; XPS; XPS MEASUREMENTS;

ABSORPTION; ABSORPTION SPECTROSCOPY; ATOMS; BORON; BORON COMPOUNDS; CARBON NITRIDE; ELECTRONS; FIELD EMISSION; FIELD EMISSION MICROSCOPES; GRAPHITE; PHOTOELECTRICITY; PHOTOIONIZATION; PHOTONS; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SYNCHROTRON RADIATION; SYNCHROTRONS; X RAY ABSORPTION; X RAYS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 77953171764     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.11.086     Document Type: Article

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