Preparation of B-C-N thin films by r.f. plasma assisted CVD

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 376-379

  Polo, M C ^a   Martinez E ^a   Esteve, J ^a   Andujar J L ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

B C N films; Hard coatings; Microhardness; r.f. plasma CVD

Indexed keywords

BORON COMPOUNDS; CARBON; CHEMICAL VAPOR DEPOSITION; NITROGEN; PLASMAS; THIN FILMS;

MICROHARDNESS;

CERAMIC MATERIALS;

EID: 0031995623     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00167-2     Document Type: Article

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