Hard BCxNy thin films grown by dual ion beam sputtering

Thin Solid Films

Volumn 515, Issue 1, 2006, Pages 207-211

  Morant, C ^a   Prieto, P ^a   Bareno J ^a   Sanz, J M ^a   Elizalde, E ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

BCN; CN; Hardness; XPS

Indexed keywords

BINARY CARBONITRIDE; BORON CARBONITRIDE; ION BEAM SPUTTERING; NANOINDENTERS;

BORON COMPOUNDS; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; ION BEAMS; SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

THIN FILMS;

EID: 33749991432     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.063     Document Type: Article

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