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Journal of Materials Science

Volumn 36, Issue 16, 2001, Pages 3925-3931

Study of BCN compounds prepared by the chemical vapor deposition with dimethylamineborane

(2) Mieno, Masahiro a Satoh, Tadao a

a NATIONAL INSTITUTE FOR MATERIALS SCIENCE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; DEPOSITION; INFRARED SPECTROSCOPY; PRESSURE EFFECTS; RAMAN SCATTERING; SUBSTRATES; SYNTHESIS (CHEMICAL); TERNARY SYSTEMS; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIMETHYLAMINEBORANE;

THIN FILMS;

EID: 0035880543 PISSN: 00222461 EISSN: None Source Type: Journal
DOI: 10.1023/A:1017966004367 Document Type: Article

Times cited : (20)

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