Magnetron-sputtered superhard materials

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 45-59

  Ulrich, S ^a   Theel, T ^a   Schwan, J ^a   Ehrhardt, H ^a  

^a France   (Germany)

Author keywords

Beta silicon carbide; Boron carbide; Cubic boron nitride; DLC; Magnetron sputtering; PVD; Superhard materials ta C; Thin films

Indexed keywords

AMORPHOUS FILMS; BORON CARBIDE; CHEMICAL BONDS; CRYSTALLIZATION; CUBIC BORON NITRIDE; DENSIFICATION; HARDNESS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SILICON CARBIDE; SUBSTRATES; VAPOR DEPOSITION;

DIAMOND LIKE CARBON; ION PLATING; PHYSICAL VAPOR DEPOSITION; SUPERHARD MATERIALS;

THIN FILMS;

EID: 0031388049     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00159-X     Document Type: Article

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