Analytical method of predicating the instabilities of a micro arch-shaped beam under electrostatic loading

Microsystem Technologies

Volumn 16, Issue 6, 2010, Pages 909-918

  Zhang, Yin ^a   Wang, Yisong ^b   Li, Zhihong ^b  

^a INSTITUTE OF MECHANICS   (China)

^b PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION MECHANISM; ACTUATOR DESIGN; ANALYTICAL METHOD; ANALYTICAL RESULTS; ANALYTICAL SOLUTIONS; DIRECT PULL; DISCONTINUOUS DISPLACEMENT; EFFECTIVE STIFFNESS; EXPERIMENTAL DATA; FLIP-OVER; HIGHER ORDER; MODE APPROXIMATIONS; MODE EXPANSION; MULTIMODES; NONLINEAR TERMS; NUMERICAL SOLUTION; OVER-RESPONSE; PULL-IN INSTABILITY; SHAPED BEAM; SNAP-THROUGH; SNAP-THROUGH INSTABILITY; SOLUTION APPROACH; SYSTEM FAILURES; TRUNCATION ERRORS;

ARCHES; ELECTROSTATICS; FUZZY CONTROL; LOADING; NUMERICAL ANALYSIS; TAYLOR SERIES;

STABILITY;

EID: 77952424726     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1031-y     Document Type: Article

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