Vibration of an adhered microbeam under a periodically shaking electrical force

Journal of Adhesion Science and Technology

Volumn 19, Issue 9, 2005, Pages 799-815

  Zhang, Yin ^a   Zhao, Ya Pu ^a  

^a INSTITUTE OF MECHANICS   (China)

Author keywords

Adhesion; Electrical force; Microbeam; Peel number; Quasistatic; Vibration

Indexed keywords

CONVERGENCE OF NUMERICAL METHODS; EQUATIONS OF MOTION; GALERKIN METHODS; ITERATIVE METHODS; MATHEMATICAL MODELS; NATURAL FREQUENCIES;

ELECTRICAL FORCE; MICROBEAM; PEEL NUMBER; QUASISTATIC; VIBRATION ANALYSIS;

VIBRATIONS (MECHANICAL);

EID: 25444476101     PISSN: 01694243     EISSN: None     Source Type: Journal    
DOI: 10.1163/1568561054867864     Document Type: Article

References (34)

1. F. Yang, J. Appl. Phys. 92, 2789 (2002).
2. E. Chan, K. Carikipati and R. W. Dutton, J. Microelectromech. Syst. 8, 208 (1999)
3. S. G. Adams, F. M. Bertsch, K. A. Shaw, P. G. Hartwell, F. C. Moon and N. C. MacDonald, J. Micromech. Microeng. 8,15 (1997).
4. W. M. van Spengen, R. Puers and I. De Wolf, J. Micromech. Microeng. 12, 702 (2002).
5. P. M. Osterberg and S. D. Senturia, J. Microelectromech. Syst. 6, 107 (1997).
6. E. M. Abdel-Rahman, M. I. Younis and A. H. Nayfeh, J. Micromech. Microeng. 12, 759 (2002).
7. E. S. Hung and S. D. Senturia, J. Microelectromech. Syst. 8, 497 (1999).
8. H. A. Tilmans and R. Legtenberg, Sensors Actuators A 45, 67 (1994).
9. Y. Zhang and Y. P. Zhao, Acta Mech. Sol. Sin. 17, 104 (2004).
10. C. H. Mastrangelo and C. H. Hsu, J. Microelectromech. Syst. 2, 33 (1993).
11. C. H. Mastrangelo and C. H. Hsu, J. Microelectromech. Syst. 2, 44 (1993).
12. N. R. Tas, C. Gui and M. Elwenspoek, J. Adhesion Sci. Technol. 17, 547 (2003).
13. E. E. Jones, M. R. Begle and K. D. Murphy, J. Mech. Phys. Solids 51, 1601 (2003).
14. M. P. de Boer and T. A. Michalske, J. Appl. Phys. 86, 817 (1999).
15. M. P. de Boer, J. A. Knapp, T. M. Mayer and T. A. Michalske, in: Proc. SPIE, Vol. 3825, p. 2 (1999).
16. P. H. McDonald, J. Appl. Mech. 22, 573 (1955).
17. Y. P. Zhao, L. S. Wang and T. X. Yu, J. Adhesion Sci. Technol. 17, 519 (2003).
18. H. H. Yu and Z. Suo, J. Mech. Phys. Solids 46, 829 (1998).
19. T. C. Chang and R. R. Craig, J. Eng. Mech., 195, 1027 (1969).
20. E. H. Dowell, J. Appl. Mech. 51, 439 (1984).
21. J. Dugundji, AIAA J. 26, 1013 (1988).
22. T. J. R. Hughes, The Finite Element Method: Linear Static and Dynamic Finite Element Analysis. Prentice-Hall, Englewood Cliffs, NJ (1987).
23. V. Cannillo and M. Mancuso, J. Sound Vibr. 249, 599 (2002).
24. R. E. Cornwell and D. S. Malkus, Comput. Methods Appl. Mech. Eng. 97, 149 (1992).
25. A. H. Nayfeh and D. T. Mook, Nonlinear Oscillations. Wiley, New York, NY (1979).
26. S. W. Shaw and P. J. Holmes, Phys. Rev. Lett. 51, 623 (1983).
27. S. W. Shaw and P. J. Holmes, J. Sound Vibr. 90, 129 (1983).
28. G. S. Whiston, J. Sound Vibr. 152, 427 (1992).
29. W. M. van Spengen, R. Puers and I. De Wolf, IEEE Trans. Device Mater. Reliabil. 3, 167 (2003).
30. L. B. Freund, Dynamic Fracture Mechanics. Cambridge University Press, Cambridge (1990).
31. J. R. Rice, J. Appl. Mech. 52, 571 (1985).
32. S. Ramanathan, D. Ertas and D. S. Fisher, Phys. Rev. Lett. 79, 873 (1997).
33. M. Ruths and S. Granick, Langmuir 14, 1804 (1998).
34. E. Barthel and S. Roux, Langmuir 16, 8134 (2000).