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Volumn 7, Issue 4, 1997, Pages 285-309

Equivalent circuit representation of electromechanical transducers: II. Distributed-parameter systems

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; DISTRIBUTED PARAMETER CONTROL SYSTEMS; ELECTROMECHANICAL DEVICES; EQUIVALENT CIRCUITS;

EID: 0031379736     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/4/005     Document Type: Article
Times cited : (136)

References (26)
  • 1
    • 0030091526 scopus 로고    scopus 로고
    • Equivalent circuit representation of electromechanical transducers - Part I: Lumped-parameter systems
    • Tilmans H A C 1996 Equivalent circuit representation of electromechanical transducers - part I: lumped-parameter systems J. Micromech. Microeng. 6 157-76
    • (1996) J. Micromech. Microeng. , vol.6 , pp. 157-176
    • Tilmans, H.A.C.1
  • 2
    • 84955026059 scopus 로고
    • Vibrations of a systems with a finite or an infinite number of resonances
    • Skudrzyk E J 1958 Vibrations of a systems with a finite or an infinite number of resonances J. Acoust. Soc. Am. 30 1140-52
    • (1958) J. Acoust. Soc. Am. , vol.30 , pp. 1140-1152
    • Skudrzyk, E.J.1
  • 7
    • 0000709060 scopus 로고
    • Piezoelectric and piezomagnetic materials and their function in transducers
    • ed W P Mason (New York: Academic)
    • Berlincourt D A, Curran D R and Jaffe H 1964 Piezoelectric and piezomagnetic materials and their function in transducers Physical Acoustics vol IA, ed W P Mason (New York: Academic) pp 169-270
    • (1964) Physical Acoustics , vol.1 A , pp. 169-270
    • Berlincourt, D.A.1    Curran, D.R.2    Jaffe, H.3
  • 11
    • 21344486668 scopus 로고
    • Review of excitation and detection mechanisms for micromechanical resonators
    • Prak A, Lammerink T S J and Fluitman JHJ 1993 Review of excitation and detection mechanisms for micromechanical resonators Sensors Mater. 5 143-81
    • (1993) Sensors Mater. , vol.5 , pp. 143-181
    • Prak, A.1    Lammerink, T.S.J.2    Fluitman, J.H.J.3
  • 14
    • 0026913677 scopus 로고
    • Micromachined atomic force microprobe with integrated capacitive read-out
    • Brugger J, Buser R A and de Rooij N F 1992 Micromachined atomic force microprobe with integrated capacitive read-out J. Micromech. Microeng. 2 218-20
    • (1992) J. Micromech. Microeng. , vol.2 , pp. 218-220
    • Brugger, J.1    Buser, R.A.2    De Rooij, N.F.3
  • 15
    • 0038981463 scopus 로고
    • Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivity
    • Albrecht T R, Grutter P, Horne D and Rugar D 1991 Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivity J. Appl. Phys. 69 668-73
    • (1991) J. Appl. Phys. , vol.69 , pp. 668-673
    • Albrecht, T.R.1    Grutter, P.2    Horne, D.3    Rugar, D.4
  • 16
    • 0028529046 scopus 로고
    • Electrostatically driven vacuum encapsulated polysilicon resonators; part II - Theory and performance
    • Tilmans HAC and Legtenberg R 1994 Electrostatically driven vacuum encapsulated polysilicon resonators; part II - theory and performance Sensors Actuators A 45 67-84
    • (1994) Sensors Actuators A , vol.45 , pp. 67-84
    • Tilmans, H.A.C.1    Legtenberg, R.2
  • 17
    • 0017958532 scopus 로고
    • High-Q selective filters using mechanical resonance of silicon beams
    • Hribsek M F and Newcomb R W 1978 High-Q selective filters using mechanical resonance of silicon beams IEEE Trans. Circuits Syst. CAS-25 215-22
    • (1978) IEEE Trans. Circuits Syst. , vol.CAS-25 , pp. 215-222
    • Hribsek, M.F.1    Newcomb, R.W.2
  • 19
    • 3142651504 scopus 로고
    • An electromechanical representation of a piezoelectric crystal used as a transducer
    • Mason W P 1935 An electromechanical representation of a piezoelectric crystal used as a transducer Proc. Inst. Radio Eng. 23 1252-63
    • (1935) Proc. Inst. Radio Eng. , vol.23 , pp. 1252-1263
    • Mason, W.P.1
  • 23
    • 84951279351 scopus 로고
    • Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung
    • Sauerbrey G 1959 Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung Z. Phys. 155 206-22
    • (1959) Z. Phys. , vol.155 , pp. 206-222
    • Sauerbrey, G.1
  • 24
    • 0000545226 scopus 로고
    • Methods and application of structural modelling from measured structural frequency response data
    • Goyder HGD 1980 Methods and application of structural modelling from measured structural frequency response data J. Sound Vib. 68 209-30
    • (1980) J. Sound Vib. , vol.68 , pp. 209-230
    • Goyder, H.G.D.1
  • 25
    • 0005089416 scopus 로고
    • Methods of measurement of the parameters of piezoelectric vibrators
    • Gerber E A and Koerner L F 1958 Methods of measurement of the parameters of piezoelectric vibrators Proc. IRE 46 1731-7
    • (1958) Proc. IRE , vol.46 , pp. 1731-1737
    • Gerber, E.A.1    Koerner, L.F.2
  • 26


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.