Analytical static modelling and optimization of electrostatic micropumps

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 183-185

  Francais, Olivier ^a   Dufour, Isabelle ^a   Sarraute, Emmanuel ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION;

ELECTROSTATIC MICROPUMPS;

PUMPS;

EID: 0031224736     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/027     Document Type: Article

References (5)

1. Zengerle R, Richter M, Brosinger F, Richter A and Sandmaier H 1993 Performance simulation of microminiaturized membrane pumps Transducer '93 (7-10 June 1993, Yokohama, Japan) pp 106-9
2. Timoshenko S P and Woinowsky-Krieger S 1959 Theory of Plates and Shells 2nd edn (New York: McGraw-Hill)
3. Blasquez G, Naciri Y, Blondel P, Ben Moussa N and Pons P 1987 Static response of miniature pressure sensors with square or rectangular diaphragm Rev. Phys. Appl, 22 505-10
4. Francais O, Dufour I, Sarraute E and Maubossin J M 1996 Modelisation et simulation de pompes electrostatiques a membranes Firelec 1996 (1-3 April 1996, Lyon, France) pp 214-7
5. Gilbert J R, Ananthasuresh G K and Senturia SD 1996 3D modeling of contact problems and hysteresis in coupled Electro-Mechanics IEEE MEMS'1996 (11-15 February 1996, San Diego, CA, USA) pp 127-32