Static study of cantilever beam stiction under electrostatic force influence

Acta Mechanica Solida Sinica

Volumn 17, Issue 2, 2004, Pages 104-112

  Zhang, Yin ^a   Zhao, Ya Pu ^b  

^a UNIVERSITY OF CONNECTICUT   (United States)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

Adhesion stiction; Constraint; Electrostatic force; Galerkin method; Micro cantilever beam; Peel number; Stationary

Indexed keywords

ADHESION; APPROXIMATION THEORY; COMPUTATIONAL METHODS; CONSTRAINT THEORY; DEFORMATION; DIELECTRIC DEVICES; ELECTRIC POTENTIAL; ELECTROSTATICS; GALERKIN METHODS; POLYNOMIALS; PROBLEM SOLVING; THICKNESS MEASUREMENT;

ADHESION/STICTION; CONSTRAINT; ELECTROSTATIC FORCE; MICRO-CANTILEVER BEAM; PEEL NUMBER; STATIONARY;

CANTILEVER BEAMS;

EID: 4544304317     PISSN: 08949166     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (27)

1. Osterberg,P.M. and Senturia,S.D., M-Test: A rest chip for MEMS material property measurement using electrostatically actuated test structures, Journal of Microelectromechanical Systems, Vol.6, 1997, 107-118.
2. Abdel-Rahman,E.M., Younis,M.I. and Nayfeh,A.H., Characterization of the mechanical behavior of an electrically actuated microbeam, J. Micromech. Microeng., Vol.12, 2002, 759-766.
3. Chan,E.K., Carikipati,K. and Dutton,R.W., Characterization of contact electromechanics through capacitance-voltage measurement and simulation, Journal of Microelectromechanical Systems, Vol.8, 1999, 208-217.
4. Adams,S.G., Bertsch,F.M., Shaw,K.A., Hartwell,P.G., Moon,F.C. and MacDonald,N.C., Capacitance based tunable resonators, J. Micromech. Microeng., Vol.8, 1997, 15-23.
5. van Spengen,W.M., Puers,R. and De Wolf,I., A physical model to predict stiction in MEMS, J. Micromech. Microeng., Vol.12, 2002, 702-713.
6. Yang,F., Electromechanical instability of microscale structures, Journal of Applied Physics, Vol.92, 2002, 2789-2794.
7. Hung,E.S. and Senturia,S.D., Extending the travel range of analog-tuned Electrostatic Actuators, Journal of Microelectromechanical Systems, Vol.8, 1999, 497-505.
8. Tilmans,H.A. and Legtenberg,R., Electrostatically driven vacuum-encapsulated polysilicon resonators - part II: theory and performance, Sensors Actuators A, Vol.45, 1994, 67-84.
9. Toshiyoshi,H., Piyawattanametha,W., Chan,C. and Wu,M.C., Linearization of electrostatically actuated surface micromachined 2-D optical scanner, Journal of Microelectromechanical Systems, Vol.10, 2001, 205-214.
10. Alley,R.L., Cuan,G.J., Howe,R.T. and Komovopoulus,K., The effect of release-etch processing on surface microstructure stiction, Proc. IEEE Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, 1992, 202-207.
11. Bhushan,B., Tribology and Mechanics of Magnetic Storage Devices, New York: Springer, 1990.
12. Anderson,K.M. and Colgate,J.F., A model of attachment/detachment cycle of electrostatic microactuators, Micromech. Sensors.Actuators and Systems, DSC, Vol.32, 1991, 255-268.
13. van Spengen,W.M., Puers,R. and De Wolf,I., The prediction of stiction failures in MEMS, IEEE Transactions on Devices and Materials Reliability, Vol.3, 2003, 167-172.
14. Zhao,Y.P., Wang,L.S. and Yu,T.X., Mechanics of adhesion in MEMS - a review, J. Adhesion Sci. Technol, Vol.17, 2003, 519-546.
15. Yeh,R., Kruglick,E.J.J. and Pister,K.S.J., Microelectromechanical Component for Articulated Microrobots, Proc. 8th Int. Conf. on Solid-State Sensors and Actuators (Transducers '95) and Eurosensors IX, Stockholm, Sweden, 1995, 346-349.
16. Tas,N.R., Gui,C. and Elwenspoek,M., Static friction in elastic adhesion contacts in MEMS, J. Adhesion Sci. Technol, Vol.17, 2003, 547-561.
17. Tas,N.R., Sonnenberg,T., Jansen,H., Legtenberg,R. and Elwenspoek,M., Stiction in surface micromaching, J. Micromech. Microeng., Vol.6, 1996, 385-397.
18. Serry,F.M., Walliser,M. and Maclay,G.J., The Role of the Casimir Effect in the Static Deflection and Stiction of Membrane Strips in Microelectromechanical Systems (MEMS), Journal of Applied Physics, Vol.84, 1998, 2501-2506.
19. Jones,E.E., Begley,M.R. and Murphy,K.D., Adhesion of micro-cantilevers subjected to mechanical point loading: modeling and experiments, Journal of the Mechanics and Physics of Solids, Vol.51, 2003, 1601-1622.
20. Mastrangelo,C.H. and Hsu,C.H., Mechanical stability and adhesion of microstructures under capillary forces - part I: basic theory, Journal of Microelectromechanical Systems, Vol.2, 1993, 33-43.
21. Mastrangelo,C.H. and Hsu,C.H., Mechanical stability and adhesion of microstructures under capillary forces - part II: experiment, Journal of Microelectromechanical Systems, Vol.2, 1993, 44-55.
22. Yee,Y., Park,M. and Chun,K., A sticking model of suspended polysilicon microstructure including residual stress gradient and postrelease temperature, Journal of Microelectromechanical Systems, Vol.7, 1998, 339-344.
23. Chen,Z.R. and Yu,S.W., Capillary adhesive contact between a spherical rigid punch and a piezoelectric half space, Journal of Applied Physics, Vol.94, 2003, 6899-6907.
24. de Boer,M.P., Knapp,J.A., Mayer,T.M. and Michalske,T.A., The role of interfacial properties on MEMS performance and reliability, Proc. SPIE., Vol.3825, 1999, 2.
25. McDonald,Jr.P.H., Nonlinear Dynamic Coupling in a Beam Vibration, Journal of Applied Mechanics, Vol.22, 1955, 573-578.
26. Bochobza-Degani,O., Socher,E. and Nemirovsky,Y., On the effect of residual charges on the pull-in parameters of electrostatic actuators, Sensors and Actuators A, Vol.97-98, 2002, 563-568.
27. Chen,C.Z. et al., Mathematical Analysis, Volume 2, 2nd ed., Beijing: Gaodeng Jiaoyu Press, 1983(in Chinese).