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Physics of Plasmas

Volumn 17, Issue 3, 2010, Pages

Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma

(3) Lee, Hyo Chang a Lee, Jung Kyu a Chung, Chin Wook a

a Hanyang University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CROSS SECTION; DISCHARGE MODE; ELECTRON ENERGIES; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON ENERGY DISTRIBUTIONS; ELECTRON-ELECTRON COLLISIONS; GAS PRESSURES; INDUCTIVELY-COUPLED; MAXWELLIAN DISTRIBUTION; MODE TRANSITIONS; NITROGEN GAS; RESIDENCE TIME; VIBRATIONAL EXCITATION;

DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRIC POWER DISTRIBUTION; ELECTROMAGNETIC INDUCTION; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; INDUCTIVELY COUPLED PLASMA; ION BEAMS; NITROGEN; NITROGEN PLASMA; PLASMA COLLISION PROCESSES;

ELECTRONS;

EID: 77950557337 PISSN: 1070664X EISSN: None Source Type: Journal
DOI: 10.1063/1.3361199 Document Type: Article

Times cited : (67)

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