Low energy electron heating and evolution of the electron energy distribution by diluted O2 in an inductive Ar/O2 mixture discharge

Physics of Plasmas

Volumn 17, Issue 1, 2010, Pages

  Lee, Hyo Chang ^a   Lee, Min Hyong ^a   Chung, Chin Wook ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AR GAS DISCHARGE; COLLISIONLESS; ELASTIC COLLISION; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON ENERGY DISTRIBUTIONS; HEATING MECHANISMS; INDUCTIVE DISCHARGES; LOW ENERGY ELECTRONS; LOW PRESSURES; MAXWELLIAN DISTRIBUTION; MIXTURE DISCHARGES; SKIN DEPTH; TOTAL GAS PRESSURE;

BALLOONS; DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRIC POWER DISTRIBUTION; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; GLOW DISCHARGES; INDUCTIVELY COUPLED PLASMA; ION BEAMS; MIXTURES; PLASMA HEATING;

ELECTRON TEMPERATURE;

EID: 75749096988     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3266418     Document Type: Article

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