Properties of broadband depth-graded nmultilayer mirrors for EUV optical systems

Optics Express

Volumn 18, Issue 7, 2010, Pages 6957-6971

  Yakshin, A E ^a   Kozhevnikov, I V ^b   Zoethout, E ^a   Louis, E ^a   Bijkerk, F ^a,c  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^b SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

^c UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

MIRRORS; MULTILAYERS; OPTICAL CONSTANTS; OPTICAL PROPERTIES; OPTICAL SYSTEMS; REFLECTION;

13.5 NM; ANGLE OF INCIDENCE; ANGULAR RANGE; BAND PASS; BILAYER; DEPTH-GRADED MULTILAYERS; INTERFACIAL ROUGHNESS; LAYER THICKNESS; MO/SI MULTILAYER; PERIODIC MULTILAYERS; TECHNOLOGICAL FACTORS;

OPTICAL MULTILAYERS;

ALGORITHM; ARTICLE; EQUIPMENT DESIGN; METHODOLOGY; OPTICAL INSTRUMENTATION; OPTICS; PHYSICS; RADIATION SCATTERING; REPRODUCIBILITY; STATISTICAL MODEL; SURFACE PROPERTY; TIME;

ALGORITHMS; EQUIPMENT DESIGN; MODELS, STATISTICAL; OPTICAL DEVICES; OPTICS AND PHOTONICS; PHYSICS; REPRODUCIBILITY OF RESULTS; SCATTERING, RADIATION; SURFACE PROPERTIES; TIME FACTORS;

EID: 77950218288     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.006957     Document Type: Article

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