Determination of in-depth density profiles of multilayer structures

Journal of Applied Physics

Volumn 97, Issue 9, 2005, Pages

  Kessels, M J H ^a   Bijkerk, F ^a   Tichelaar, F D ^b   Verhoeven, J ^c  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c FOM INSTITUTE AMOLF   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY SURFACES; IN-DEPTH DENSITY; MULTILAYER STRUCTURES; SURFACE EMITTING LASERS;

AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATION; IMAGE PROCESSING; MATHEMATICAL MODELS; REFLECTOMETERS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTILAYERS;

EID: 18844386466     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1882773     Document Type: Article

References (16)

1. Eberhard Spiller, Soft X-ray Optics (Society of Photo-optical Instrumentation Engineers, 1994).
2. W. W. V. D. Hoogenhof and D. K. G. de-Boer, Mater. Sci. Forum 143-147, 1331 (1994).
3. P. J. S. Thomas, T. J. C. Hosea, D. Lancefield, Semicond. Sci. Technol. 16, 107 (2001).
4. Metin Tolan, X-Ray Scattering from Soft-Matter Thin Films (Springer-Verlag, Berlin, 1999).
5. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1987).
6. A. Aschentrup, W. Hachmann, T. Westerwalbesloh, Appl. Phys. A: Mater. Sci. Process. 77 (5), 607 (2003).
7. L. Reimer, in Transmission Electron Microscopy, Physics of Image Formation and Microanalysis (Springer, Berlin, 1997), p. 202.
8. F. Abeĺs, Ann. Phys. (Paris) 5, 596 (1950).
9. E. R. Panier and A. L. Tits, Math. Program. 59 (2), 261 (1993).
10. Craig Lawrence, Jian L. Zhou, and Andŕ L. Tits, User's Guide for CFSQP Version 2.5:A C Code for Solving (Large Scale) Constrained Nonlinear (Minimax) Optimization Problems, Generating Iterates Satisfying all Inequality Constraints (1997).
11. M. J. H. Kessels, J. Verhoeven, A. E. Yakshin, Nucl. Instrum. Methods Phys. Res. B 222 (3-4), 484 (2004).
12. R. Schlatmann, A. Keppel, S. Bultman, Appl. Phys. Lett. 68 (21), 2948 (1996).
13. S. P. Murarka, Silicides for VLSI Applications (Academic, Orlando, 1983).
14. A. E. Yakshin, E. Louis, P. C. Görts, Physica B 283, 143 (2000).
15. M. H. Modi, G. S. Lodha, M. Nayak, Physica B 325 (1-4), 272 (2003).
16. D. L. Windt, Comput. Phys. 12 (4), 360 (1998).