High-accuracy VUV reflectometry at selectable sample temperatures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5538, Issue , 2004, Pages 157-164

  Gottwald, Alexander ^a   Kroth, Udo ^a   Letz, M ^b   Schppe, Hendrik ^a   Richter, Mathias ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b SCHOTT AG   (Germany)

Author keywords

Optical constants; Reflectometry; Vacuum ultraviolet radiation

Indexed keywords

ANISOTROPY; CRYSTALS; DIELECTRIC PROPERTIES; LIGHT REFLECTION; LIGHT TRANSMISSION; OPTICAL PROPERTIES; REFLECTION; RESONANCE; SYNCHROTRON RADIATION; THERMAL EFFECTS; ULTRAVIOLET RADIATION; VACUUM APPLICATIONS;

EXTREME ULTRAVIOLET (EUV); OPTICAL ANISOTROPY; OPTICAL CONSTANTS; VACUUM-ULTRAVIOLET RADIATION;

REFLECTOMETERS;

EID: 15844400105     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.556301     Document Type: Conference Paper

References (12)

1. R. Klein, M. Krumrey, M. Richter, F. Scholze, R. Thornagel, and G. Ulm, "Radiometry with synchrotron radiation at the PTB laboratory at BESSY II", Synchr. Rad. News 15 No. 1, 23-29 (2002)
2. J. Tümmler, H. Blume, G. Brandt, J. Eden, B. Meyer, H. Scherr, F. Scholz, F. Scholze, G. Ulm, "Characterization of the PTB EUV reflectometry facility for large EUVL optical components", Proc. SPIE 5037, 265-273 (2003)
3. J. H. Burnett, Z. H. Levine, E. L. Shirley, "Intrinsic birefringence in calcium fluoride and barium fluoride", Phys. Rev. B 64, 241102R (2001)
4. H. Nakano, H. Hata, H. Nogawa, N. Deguchi, M. Kohno, Y. Chiba, "Development status of a 157nm full field scanner", Proc. SPIE 5040, 763-771 (2003)
5. 2 at 11.1 eV and its relation to the weak optical anisotropy at 157 nm", Phys. Rev. B 67, 233101 (2003)
6. D. Fuchs, M. Krumrey, P. MÜller, F. Scholze, G. Ulm, "High precision soft x-ray reflectometer", Rev. Sci. Instrum. 66, 2248-2250 (1995)
7. M. Richter, J. Hollandt, U. Kroth, W. Paustian, H. Rabus, R. Thornagel, G. Ulm, "The two normal-incidence beam lines of PTB at BESSY II, Nucl. Instrum. Meth. A 467-468, 605-608 (2001)
8. T. Tomiki, T. Miyata, "Optical studies of alkali fluorides and alkaline earth fluorides in the VUV region", J. Phys. Soc. Jap. 27, 658-678 (1969)
9. J. S. Blakemore, "Semiconducting and other major properties of gallium arsenide", J. Appl. Phys. 53, R123 (1982)
10. 2 studied by inelastic neutron scattering and density functional methods", Phys. Rev. B 68, 144301 (2003)
11. 2 caused by the vicinity of an excitonic bound state", Proc. SPIE. 4691, 1761-1769 (2002)
12. 2 caused by exciton dispersion", J. of Microlithography 2, 112-118 (2003)