Design and fabrication of depth-graded X-ray multilayers

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 493, Issue 3, 2002, Pages 189-198

  Morawe, Christian ^a   Ziegler, Eric ^a   Peffen, Jean Christophe ^a   Kozhevnikov, Igor V ^b  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

Author keywords

Depth graded; Multilayers; Sputtering; Synchrotron optics; X ray optics

Indexed keywords

BANDWIDTH; COMPUTER SIMULATION; DEPOSITION; ERROR ANALYSIS; LIGHT REFLECTION; NUMERICAL METHODS; PHOTONS; SPUTTERING; X RAY OPTICS;

X-RAY MULTILAYERS;

MULTILAYERS;

EID: 0037064544     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(02)01570-X     Document Type: Article

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