Spectral reflectance tuning of EUV mirrors for metrology applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5037 I, Issue , 2003, Pages 286-293

  Yulin, Sergiy ^a   Kuhlmann, Thomas ^a   Feigl, Torsten ^a   Kaiser, Norbert ^a  

^a FIAOF   (Germany)

Author keywords

Broadband mirror; Coating designs; EUV; Metrology; Mo Si; Narrowband mirror; Plasma source

Indexed keywords

BANDWIDTH; COATINGS; MOLYBDENUM; OPTICAL DESIGN; OPTICAL MULTILAYERS; OPTIMIZATION; PLASMA SOURCES; REFLECTION; SILICON; SPECTRUM ANALYSIS; THICKNESS MEASUREMENT; ULTRAVIOLET SPECTROSCOPY;

BROADBAND MIRROR; COATING DESIGN; INTEGRAL REFLECTIVITY; METROLOGY APPLICATIONS; NARROWBAND MIRROR; RADIATION FILTRATION; REFLECTION BANDWIDTH; SPECTRAL REFLECTANCE TUNING;

MIRRORS;

EID: 0141831812     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482644     Document Type: Conference Paper

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