Measurement of hydrogen content in ultrathin diamond-like carbon films using low-energy elastic recoil detection analysis

Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 746-751

  Konishi, Y ^a   Ogura, S ^a   Ikuchi, N ^a   Imai, D ^a   Nishihara, T ^a   Shinohara, M ^a  

^a SHIMADZU CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; HYDROGEN; SUBSTRATES; ULTRATHIN FILMS;

DIAMOND-LIKE CARBON (DLC) FILMS; ELASTIC RECOIL DETECTION ANALYSIS (ERDA); MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION SYSTEM;

AMORPHOUS FILMS;

EID: 0033728982     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00287-3     Document Type: Article

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