Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source

Thin Solid Films

Volumn 517, Issue 24, 2009, Pages 6502-6507

  Kahn, Markus ^a   Čekada, Miha ^b   Schöberl, Thomas ^c   Berghauser, Roswitha ^a   Mitterer, Christian ^d   Bauer, Christoph ^e   Waldhauser, Wolfgang ^a   Brandstätter, Elmar ^a  

^a JOANNEUM RESEARCH   (Austria)

^b JO EF STEFAN INSTITUTE   (Slovenia)

^c ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE   (Austria)

^d UNIVERSITY OF LEOBEN   (Austria)

^e UNIVERSITY OF GRAZ   (Austria)

Author keywords

Diamond like carbon (DLC); Linear ion beam source; Mechanical properties; Raman spectroscopy

Indexed keywords

ACETYLENE FLOW; ANODE-LAYER SOURCE; CARBON ATOMS; CARBON PRECURSORS; DEFECT-FREE; DEPOSITED FILMS; DIAMOND-LIKE CARBON; DISCHARGE VOLTAGES; HYDROGENATED DIAMOND; INCREASED DISCHARGES; LINEAR ION BEAM SOURCE; LINEAR ION BEAMS; PROCESS PARAMETERS; PROCESS PRESSURE; RAMAN SPECTRA; REDUCED ELASTIC MODULUS; ROOM TEMPERATURE; SPECTROSCOPIC DATA; STRUCTURAL AND MECHANICAL PROPERTIES; STRUCTURAL DISORDERS;

ACETYLENE; CARBON FILMS; DIAMOND DEPOSITS; DIAMOND FILMS; DIAMONDS; INDUCTIVELY COUPLED PLASMA; ION BEAMS; IONS; LIGHTING; MECHANICAL PROPERTIES; OPTICAL SENSORS; RAMAN SCATTERING; RAMAN SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 71749117774     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.03.213     Document Type: Article

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