Revisiting the B-factor variation in a-SiC:H deposited by HWCVD

Thin Solid Films

Volumn 430, Issue 1-2, 2003, Pages 186-188

  Swain, Bibhu P ^a   Patil, Samadhan B ^a   Kumbhar, Alka ^a   Dusane, R O ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

Author keywords

B parameter; Hot wire chemical vapour deposition (HWCVD); Tauc plot

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; FILM PREPARATION; OPTICAL PROPERTIES; SUBSTRATES;

HOT-WIRE CHEMICAL VAPOR DEPOSITION (HWCVD);

THIN FILMS;

EID: 0038527219     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00107-X     Document Type: Conference Paper

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