Electrical and structural characterization of DLC films deposited by magnetron sputtering

Journal of Materials Science: Materials in Electronics

Volumn 12, Issue 4-6, 2001, Pages 343-346

  Massi, M ^a   Maciel, H S ^a   Otani, C ^a   Mansano, R D ^b   Verdonck, P ^b  

^a INSTITUTO TECNOLÓGICO DE AERONÁUTICA   (Brazil)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITION REACTIONS; ANNEALING; CHEMICAL MODIFICATION; DEHYDROGENATION; ELECTRIC CONDUCTIVITY OF SOLIDS; HYDROGENATION; MAGNETRON SPUTTERING; PERMITTIVITY; RAMAN SPECTROSCOPY; SURFACE ROUGHNESS; THERMAL EFFECTS;

DISCHARGE GAS; HYDROGENATED FILMS;

DIAMOND LIKE CARBON FILMS;

EID: 0035299445     PISSN: 09574522     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1011252629646     Document Type: Article

References (4)