Amorphous hydrogenated carbon films deposited by a closed-drift ion source

Laser and Particle Beams

Volumn 21, Issue 2, 2003, Pages 285-289

  Bugaev, Sergei P ^a   Chun, Hui Gon ^b   Sochugov, Nikolay S ^a   Oskomov, Konstantin V ^a   Zakharov, Alexander N ^a  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

^b University of Ulsan   (South Korea)

Author keywords

a C:H films; Closed drift ion source; Plastic substrates; Wear resistance

Indexed keywords

AMORPHOUS FILMS; CARBON; DEPOSITION; FRICTION; HARDNESS; HYDROGENATION; SURFACE ROUGHNESS; WEAR RESISTANCE;

CARBON FILMS; DIELECTRIC SUBSTRATES; PLASTIC SUBSTRATES;

ION BEAMS;

EID: 0344897115     PISSN: 02630346     EISSN: None     Source Type: Journal    
DOI: 10.1017/S0263034603212180     Document Type: Article

References (10)

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