Direct removal of SU-8 using focused laser writing

Applied Physics A: Materials Science and Processing

Volumn 87, Issue 1, 2007, Pages 71-76

  Cheong, F C ^a   Varghese, B ^a   Sindhu, S ^a   Liu, C M ^a   Valiyaveettil, S ^a   Bettiol, A A ^a   Van Kan, J A ^a   Watt, F ^a   Chin, W S ^a   Lim, C T ^a   Sow, C H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; GLASS; LASER BEAMS; MICROOPTICS; THERMODYNAMIC STABILITY;

LASER BEAM TRAVERSE; LASER FABRICATION; MICRO DEVICES;

PHOTORESISTS;

EID: 33847239194     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-006-3846-z     Document Type: Article

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