A new SU-8 process to integrate buried waveguides and sealed microchannels for a Lab-on-a-Chip

Sensors and Actuators, B: Chemical

Volumn 114, Issue 1, 2006, Pages 542-551

  Ruano Lopez J M ^a   Aguirregabiria, M ^a   Tijero, M ^a   Arroyo, M T ^a   Elizalde, J ^a   Berganzo, J ^a   Aranburu, I ^a   Blanco, F J ^a,b   Mayora, K ^a  

^a IK4 IKERLAN   (Spain)

^b NanoScience Spanish Society   (Spain)

Author keywords

Lab on a Chip; Microfabrication; Microfluidics; Microoptics; Packaging; SU 8; Waveguides

Indexed keywords

MICROFABRICATION; MICROFLUIDIC STRUCTURES; OPTICAL CONNECTORS;

ABSORPTION; ELECTRONICS PACKAGING; FLOW OF FLUIDS; FLUIDIC DEVICES; MICROOPTICS; OPTICAL SENSORS; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SILICON WAFERS; THICK FILMS;

MICROPROCESSOR CHIPS;

EID: 33244491675     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.05.011     Document Type: Article

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