Single-use microvalve fabricated using Printed Circuit Board and SU8 technologies

Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

Volumn , Issue , 2009, Pages 334-337

  Aracil, Carmen ^a   Moreno, J Miguel ^a   Quero, José M ^a  

^a UNIVERSITY OF SEVILLE   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION PROCESS; BIOCHEMICAL SUBSTANCES; ELECTRONIC DEVICES; LOW COSTS; MICRO VALVES; MICRO-FLUIDIC;

ELECTRON DEVICES; PRINTED CIRCUIT MANUFACTURE;

PRINTED CIRCUIT BOARDS;

EID: 64949167374     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SCED.2009.4800500     Document Type: Conference Paper

References (14)

1. T. Thorsen, S. J. Maerkl, S. R. Quake. "Microfluidic Large-Scale Inte gration". Science 18 Octuber 2002: Vol. 298. no. 5593, pp. 580 - 584.
2. McDonald JC, Duffy DC, Anderson JR, Chiu DT, Wu H, Schueller OJ, Whitesides GM. "Fabrication of microfluidic systems in poly(dimethylsiloxane)". Electrophoresis. 2000 Jan; 21(1): pp 27-40.
3. Becker H, Gartner C. "Polymer microfabrication methods for microfluidic analytical applications." Electrophoresis. 2000 Jan; 21(1): 12-26
4. Guerin, L.J.; Dubochet, O.; Zeberli, J.-F.; Clot, P.; Renaud, P.; "Miniature one-shot valve". Micro Electro Mechanical Systems 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop (1998) 425 -428.
5. P. Griss, H. Andersson and G. Stemme "Expandable microspheres for the handling of liquids". Lab Chip. (2002). 117 - 120.
6. J. R. Webster. "Micro valve actuator". United States Patent 6527003 (2003)
7. A. Debray,M. Shibata and H. Fujita. "A low melting point alloy as a functional material for a one-shot micro-valve". J.Micromech.Microeng. (2007). 1442-1450.
8. Fries, D.; Broadbent, H.; Steimle, G.; Ivanov, S.; Cardenas-Valencia, A.; Fu, J.; Weller, T.; Natarajan, S.; Guerra, L.; "PCB MEMS for environmental sensing systems" Industrial Electronics Society, 2005. IECON 2005. 31st Annual Conference of IEEE (2005). 5 pp.
9. Weber, B.S.M.; Kretly, L.C.; "PCB-MEMS RF Switch: Parametric analysis and design guide lines". Microwave and Optoelectronics Conference, 2007. IMOC 2007. SBMO/IEEE MTT-S International. (2007). 141 - 144
10. J.E. Rogers, R. Ramadoss, P.M. Ozmun, R.N. Dean, MEMS Accelerometer Fabricated Using Printed Circuit Processing Techniques. Industrial Electronics, 2007. ISIE 2007. IEEE International Symposium 2007. 3250 - 3254
11. S. H. Ng; Z. F. Wang; R. T. Tjeung and N. F. de Rooij; "Multi-layer SU- 8 lift-off technology for microfluidic devices". J.Micromech. Microeng. (2005). 1115 - 1130.
12. W. C. Young, R. G. Budynas, Roark's formulas for stress and strain McGraw Hill, 2002.
13. C. Luo, T.W. Schneider, R.C. White, J. Currie and M. Paranjape, A simple deflection-testing method to determine poisson's ratio for MEMS applications, J. Micromech. Microeng. Volume 13, Number 1. 2003, 129133.
14. B. Schoeberle, M. Wendlandt, C. Hierold Long-term creep behavior of SU-8 membranes: Application of the timestress superposition principle to determine the master creep compliance curve Sensors and Actuators A: Physical, Volume 142, Issue 1, 10 March 2008, 242-249.